Industrial Demands on Process and Device Simulation [chapter]

A. v. Schwerin, A. Spitzer
1998 Simulation of Semiconductor Processes and Devices 1998  
In this paper, we will give our view of the role of TCAD in the industrial technology development process, as well as of the division of labor between industrial TCAD, vendors of commercial TCAD software, and academia. Furthermore a list of model shortcomings is presented that -we feel still -prevent broad productive use of TCAD in industrial technology development. In the end we will define our primary demands for future development work on process and device simulation by vendors and institutes and our vision of the role of TCAD frameworks.
doi:10.1007/978-3-7091-6827-1_87 fatcat:a3ifdhv5lnhbzjj4s2mfws7dwi