The Sensing Performance of Undoped-AlGaN/GaN/Sapphire HEMT Hydrogen Gas Sensor

Mazuina Mohamad, Fong Yee Meng, Abdul Manaf Hashim
2008 2008 Second Asia International Conference on Modelling & Simulation (AMS)  
The hydrogen sensing characteristics of undoped-AlGaN/GaN/sapphire circular Schottky diodes are systematically studied and compared over wide hydrogen concentration and temperature ranges. High purity hydrogen gas was exposed to the sample together with the ambient gas of either air or pure nitrogen or without ambient gas (vacuum) at pressure in the range of 50 Torr to 200 Torr was used for both types of ambient gases. The sensing characteristics at different hydrogen concentration are
more » ... ted. The sensitivity to hydrogen gas was also investigated in dependence of various catalytic metals thickness and operating temperatures.
doi:10.1109/ams.2008.184 dblp:conf/asiams/MohamadMH08 fatcat:hqhxb52r5ncsjore6zg7ndcmzu