Ultraprecision Micro Machining of Structures with High Aspect Ratio
高アスペクト比形状の超精密マイクロ切削加工

Hajime SUZUKAWA, Yoshimi TAKEUCHI, Kiyoshi SAWADA, Tomohiko KAWAI, Yasuhiro SAKAIDA
2002 Journal of the Japan Society for Precision Engineering  
doi:10.2493/jjspe.68.1470 fatcat:ulgtig2qfbcjfpbgey3c6vboeu