It was shown that despite the difference in the morphology of thin gold films obtained by different methods and on different substrates, the films mainly consist of spherical nanoparticles. The linear dimensions of individual surface objects were determined using the example of a gold film on mica. Analysis of the surface morphology showed that its structural formations are evenly distributed and have sizes from 250 nm to 500 nm. Upon receipt of gold nanofilms by magnetron sputtering on a glass

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... substrate, the size of individual gold nanoparticles ranges from 20 nm to 80 nm. When ion spraying on a substrate of polished monocrystalline silicon, the size of individual gold nanoparticles ranges from 2 nm to 10 nm. The union of individual nanoparticles into large elongated nanoobjects up to 20-40 nm in size is observed. Thus, having the opportunity to compare data on the mode of vacuum deposition (substrate temperature, beam density, deposition time, etc.), as well as surface relief, you can develop technologies for obtaining a surface with a given set of properties, as well as develop new methods of gold deposition on different surfaces. The obtained results are very important for application in biology and medicine. They make it possible to create different types of sensors and diagnostic tests.