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Silicon Micromachining for High Performance Passive Structures at W Band
2002
Active and Passive Electronic Components
Preserved Fulltext
This paper presents a micromachined technology allowing the realization of very high aspect ratio millimeter-wave circuits. Appropriate 3D electromagnetic simulations based on the finite element method have been implemented to design the circuits. Coplanar transmission lines featuring loss level in the 2 dB range up to 105 GHz have been realized. An original silicon micromachined cavity using the whispering gallery modes properties has been realized achieving a quality factor close to 10,000 range at 95 GHz.
doi:10.1080/08827510211278
fatcat:lfhafqkwovgvjfuhgicfmj7qxy