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We describe levitation of diamond fine particles in the H 2 rf plasma chamber equipped with an adaptive rf electrode. Since suppression of ion bombardment is essential for crystalline diamond growth, we use an adaptive rf electrode system in a parallel-plate capacitively coupled rf plasma in order to levitate particles in a quasineutral "spot plasma" region. Here the ions energy corresponds only to the floating potential of the particles without the additional energy of the streaming ions as indoi:10.1088/0963-0252/17/3/035014 fatcat:p5teygysijau7gggklz55x3kxa