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Faceting of local droplet-etched nanoholes in AlGaAs
2018
PHYSICAL REVIEW MATERIALS
Nanoholes, drilled in the (001) surface of AlGaAs by local Al droplet etching, are shown to consist of faceted inner walls. The most prominent facets of the inverted pyramidlike nano-sized etch pits are the {111}A and {111}B surfaces, which differ in their atomic surface terminations. In the [110] direction, the {111} facets change to {112} and/or {113}, which are both stepped surfaces with (111)A terraces. Etching-temperaturedependent data indicate that this facet transition seems kinetically
doi:10.1103/physrevmaterials.2.106001
fatcat:6ht6dgvqozfsde4odydunzir44