INFLUENCE OF POWER SOURCE TYPE ON TIME DEPENDENCE OF THE PLASMA PARAMETERS OF A PULSE DISCHARGE WITH A HOLLOW CATHODE

V.Yu. Bazhenov, V.V. Tsiolko, V.M. Piun
2022 Problems of Atomic Science and Technology  
Peculiarities of the time dependence of the plasma parameters of a pulsed discharge with a hollow cathode in low-pressure argon were experimentally determined when using two types of pulsed high-voltage power sources – voltage and current sources (pulse duration up to 10 ms, voltage up to 10 kV). It is shown that the use of pulsed current sources provides significantly more stable discharge glow in the working range of argon pressure variations (2.5...10)10-4 Torr. At the same time, the
more » ... ture of plasma electrons of the discharge which was powered by a voltage source, was several times higher and could reach 40 eV.
doi:10.46813/2022-142-095 fatcat:aostrmqplvcjlit5ro4a77237e