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Special Issue/Deposition Methods, Characterizations and Applications of Diamond Films. Applications of CVD-grown Diamond Films to Electronic Devices
小特集 ダイヤモンド薄膜の成膜技術・評価および応用 CVDダイヤモンド薄膜の電子デバイスへの応用

Ken OKANO, Tateki KUROSU, Masamori IIDA
1991 Journal of The Surface Finishing Society of Japan  

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doi:10.4139/sfj.42.1230 fatcat:zkz63oychzbjtiihj2qeniasye
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Ken OKANO, Tateki KUROSU, Masamori IIDA. "Special Issue/Deposition Methods, Characterizations and Applications of Diamond Films. Applications of CVD-grown Diamond Films to Electronic Devices." Journal of The Surface Finishing Society of Japan 42.12 (1991) 1230-1234