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1209 High output tube-type ECF micropump by using MEMS technology
1209 MEMS技術を用いた高出力管路形ECFマイクロポンプ(アクチュエータのためのマイクロナノプロセス,一般講演)
2010
The Proceedings of the Machine Design and Tribology Division meeting in JSME
1209 MEMS技術を用いた高出力管路形ECFマイクロポンプ(アクチュエータのためのマイクロナノプロセス,一般講演)
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