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A novel relaxation phenomenon occurs in buried SrRuO 3 layers in strained ͑Ca 1−x Sr x ͒͑Zr 1−x Ru x ͒O 3 / SrRuO 3 / SrTiO 3 ͑001͒ thin film system. The lightly strained SrRuO 3 buried layer is initially clamped by the SrTiO 3 substrate. After a heavily strained ͑Ca 1−x Sr x ͒͑Zr 1−x Ru x ͒O 3 overlayer is deposited, localized strain relaxation develops in the buried layer. This is manifested by a crosshatch pattern of ͗100͘ corrugations on the surface, due to the slip of ͗110͘ ͕110͖ threadingdoi:10.1063/1.2221900 fatcat:pb5jsercyzhnxb6qlpwsn6zb2m