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Automated Sample Preparation of Nanoscale Devices for FESEM

RR Cerchiara, PE Fischione, MF Boccabella, AC Robins
2009 Microscopy and Microanalysis  

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doi:10.1017/s1431927609098651 fatcat:4zkqietcrndnhotpk2ujvougzy
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RR Cerchiara, PE Fischione, MF Boccabella, AC Robins. "Automated Sample Preparation of Nanoscale Devices for FESEM." Microscopy and Microanalysis 15.S2 (2009) 1076-1077