A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
To study ferroelectric size effects in heteroepitaxial SrRuO 3 / BaTiO 3 / SrRuO 3 capacitors, ultrathin BaTiO 3 layers were deposited in wedge form across SrTiO 3 substrates. The wedgelike films were fabricated by using either an off-center substrate-target geometry or via a moveable shutter during high-pressure sputter deposition. The crystallinity, composition, and surface roughness along wedgelike BaTiO 3 films were verified by x-ray diffraction, Rutherford backscattering spectrometry, anddoi:10.1063/1.2972135 fatcat:26yyllvu7vgvxiomrbeio4xzqq