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MEMS reliability in a vibration environment

D.M. Tanner, J.A. Walraven, K.S. Helgesen, L.W. Irwin, D.L. Gregory, J.R. Stake, N.F. Smith
2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)  

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MicroElectroMechanical Systems (MEMS) were subjected to a vibration environment that had a peak acceleration of 120g and spanned frequencies from 20 to 2000 Hz. The device chosen for this test was a surface-micromachined microengine because it possesses many elements (springs, gears, rubbing surfaces) that may be susceptible to vibration. The microengines were unpowered during the test. We observed 2 vibration-related failures and 3 electrical failures out of 22 microengines tested.
more » ... , the electrical failures also arose in four microengines in our control group indicating that they were not vibration related. Failure analysis revealed that the electrical failures were due to shorting of stationary comb fingers to the ground plane.
doi:10.1109/relphy.2000.843904 fatcat:p3xcbb4qb5hyvmc5yryo5sa2je
Citation

D.M. Tanner, J.A. Walraven, K.S. Helgesen, L.W. Irwin, D.L. Gregory, J.R. Stake, N.F. Smith. "MEMS reliability in a vibration environment." 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059)