Parallel-plate MEMS mirror design for large on-resonance displacement

S.R. Bhalotra, J.D. Mansell, H.L. Kung, D.A.B. Miller
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)  
We present an electrostatically actuated MEMS mirror with 65 µm of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.
doi:10.1109/omems.2000.879642 fatcat:xapypqbuezdqphy3mybgj7k7hi