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2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)
We present an electrostatically actuated MEMS mirror with 65 µm of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications.doi:10.1109/omems.2000.879642 fatcat:xapypqbuezdqphy3mybgj7k7hi