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A completely monolithic high-Q Q Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator with the intent of achieving high stability. The operation and performance of micromechanical resonators are modeled, with emphasis on circuit and noise modeling of multiport resonators. A series resonant oscillator design is discussed that utilizes a unique,doi:10.1109/4.753677 fatcat:awv63erwuvgbljn4xys7a3xi5m