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Effective Maintenance by Reducing Failure-Cause Misdiagnosis in Semiconductor Industry (SI)
2015
International Journal of Prognostics and Health Management
Increasing demand diversity and volume in semiconductor industry (SI) have resulted in shorter product life cycles. This competitive environment, with high-mix low-volume production, requires sustainable production capacities that can be achieved by reducing unscheduled equipment breakdowns. The fault detection and classification (FDC) is a well-known approach, used in the SI, to improve and stabilize the production capacities. This approach models equipment as a single unit and uses sensors
doi:10.36001/ijphm.2015.v6i1.2241
doaj:cd566a04c9f34333bffe5041d7cac889
fatcat:b6arotxkpnfhbn4ew5vjdw7hhi