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On the Roadmap, Off the Roadmap, Beyond the Roadmap for Lithography
1999
Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)
The semiconductor industry, the long period of sustained growth which is, in no small measure due to the optical lithography process, is now faced with a dilemma. Optical lithography has reached a crossroad, and after many years of steady improvement in device performance, device integration, and cost reduction, the industry is facing a major crisis. In Japan, Europe and the U.S., consortiums comprising members from government, business, and academic organizations have been formed in an effort
doi:10.2494/photopolymer.12.585
fatcat:eoujagpysrerpafylw7p2wqpqm