CONTROL OF MAGNETOCRYSTALLINE ANISOTROPY OF Co-Zn FERRITE SPUTTERED FILMS

N. MATSUSHITA, K. NOMA, S. NAKAGAWA, M. NAOE
1998 Journal of the Magnetics Society of Japan  
Co ferrite and Co-Zn ferrite films were deposited on Si0 2 /Si substrates and quarts disks under various preparation conditions using the facing targets sputtering apparatus and their crystallographic, magnetic and read/write characteristics have been investigated. Co ferrite films deposited at partial oxygen gas pressure P 02 below 0.2 mTorr at various substrate temperature revealed (311) orientation and quasi in-plane magnetic anisotropy. High Ts above 500°C and P 02 of2.0 mTorr were
more » ... to obtain well (111) orientation which had isotropic orientation of magnetization and was suitable for high recording density media. On the other hand, Co-Zn ferrite films deposited at Ts up to 250°C and P 02 of 0.01 mTorr had (111) orientation and possessed moderately large 47tMs of about 3.7 kG and almost the same in-plane and perpendicular coercivity of about 2.0 kOe. The (111) oriented Co-Zn ferrite disk exhibited high linear recording density Dso as high as 136 kfrpi. I.
doi:10.3379/jmsjmag.22.s1_117 fatcat:mbosxftlprcodbnu6idiffp6t4