System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation

Yongquan Wang, Hualing Chen, Xueming He
2007 Microsystem Technologies : Micro- and Nanosystems Information Storage and Processing Systems  
A rapid and accurate system-level modeling and simulation for a novel electrostatic-feedback microaccelerometer, based on equivalent networks and electrical analogies, are presented in this paper. With the employment of the structured design strategy, the system is hierarchically decomposed at first, and the macromodel of the elementary transducer (a variable capacitor), is accordingly generated using the nodal analysis method, with the form of matrix or network. Based on this, the two types of
more » ... differential capacitors, which respectively serve as sense and feedback elements, are mainly discussed and modeled. Expressed as equivalent circuits, they are coupled with the outside components, constructing an equivalent electrical representation that describes the completed mixed-domain system. The validity of the proposed model is verified by a good agreement between the simulation results implemented in the electrical simulator, OrCAD/Pspice, and those from VHDL-AMS approach. Then, some dynamic characteristics of the system are discussed. This computational prototyping provides a valuable foundation for further predictable optimal design for the product, with great benefit in reducing the costs and improving the effectiveness.
doi:10.1007/s00542-006-0361-2 fatcat:wo7adp4bindkhkc45kehgop4la