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Using Direct Solid Sampling ICP-MS to Complement SEM-EDX and SIMS in Characterizing Semiconductor Materials
2003
AIP Conference Proceedings
The coupling of laser ablation systems with inductively coupled plasma (ICP) mass spectrometry has been done for many years, however the quantitative aspects as well as the applications have often been limited. Recently, LA ICP-MS has been developed into a valuable analytical tool in our laboratory to address new applications, and some experimental difficulties encountered by SEM-EDX and SIMS in characterizing solid semiconductor, electronic, and optical communication materials. In this paper
doi:10.1063/1.1622550
fatcat:hebls5spbbecdkxxv4bjaatmka