Using Direct Solid Sampling ICP-MS to Complement SEM-EDX and SIMS in Characterizing Semiconductor Materials

Fuhe Li
2003 AIP Conference Proceedings  
The coupling of laser ablation systems with inductively coupled plasma (ICP) mass spectrometry has been done for many years, however the quantitative aspects as well as the applications have often been limited. Recently, LA ICP-MS has been developed into a valuable analytical tool in our laboratory to address new applications, and some experimental difficulties encountered by SEM-EDX and SIMS in characterizing solid semiconductor, electronic, and optical communication materials. In this paper
more » ... will discuss many of the applications as well as the pros, cons, and complementary features of the laser ablation technique as it relates to electronics industry issues.
doi:10.1063/1.1622550 fatcat:hebls5spbbecdkxxv4bjaatmka