Comment on "MEMS-based high speed scanning probe microscopy" [Rev. Sci. Instrum. 81, 043702 (2010)]

F. Levent Degertekin, Hamdi Torun
2010 Review of Scientific Instruments  
doi:10.1063/1.3499232 pmid:21133506 fatcat:kjyckch2xrf5vpfgzlzf6ljb4q