A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2021; you can also visit the original URL.
The file type is
Classical scaling is no longer possible to follow Moore's law. In addition to the material innovations such as high K/metal gate and stressors, a transition to SOI is essential to meet scaling and performancerequirements alike. The advances in SOI for fully depleted devices and some key SOI applications are described.doi:10.29292/jics.v4i2.297 fatcat:b6k66nvnbjdzzey52adq7th6t4