A Review of SOI Technology and its Applications

Bich-Yen Nguyen, George Celler, Carlos Mazuré
2009 Journal of Integrated Circuits and Systems  
Classical scaling is no longer possible to follow Moore's law. In addition to the material innovations such as high K/metal gate and stressors, a transition to SOI is essential to meet scaling and performancerequirements alike. The advances in SOI for fully depleted devices and some key SOI applications are described.
doi:10.29292/jics.v4i2.297 fatcat:b6k66nvnbjdzzey52adq7th6t4