Hydrogenated Amorphous Silicon Thin-Film Disk Resonators

A. Gualdino, V. Chu, J.P. Conde
2011 Procedia Engineering  
Microelectromechanical (MEMS) structures consisting of surface micromachined disk resonators of phosphorousdoped hydrogenated amorphous silicon (n-a-Si:H) deposited by radiofrequency plasma enhanced chemical vapour deposition (RF-PECVD) were fabricated and characterized. Quality factors up to 10 4 in vacuum were measured for disk resonators operating at frequencies between 0.1 and 10 MHz. The metallized structures were actuated with electrostatic force by radially placed electrodes. Finite
more » ... nt simulations were used to identify the type of vibrational modes present and show good agreement with measured values. Resonator geometry and ambient pressure were varied to attain a generalized understanding of the RF performance. Higher harmonic modes show increasing quality factors which bears great potential when designing sensors for operation in dissipative media.
doi:10.1016/j.proeng.2011.12.377 fatcat:mxr24zzcnjbrxftf5xs7pj2m3i