An areal density of 1.6 Tbits/in. 2 has been achieved by anodically oxidizing titanium with the atomic force microscope ͑AFM͒. This density was made possible by ͑1͒ single-wall carbon nanotubes selectively grown on an AFM cantilever, ͑2͒ atomically flat titanium surfaces on ␣-Al 2 O 3 ͑1012͒, and ͑3͒ atomic scale force and position control with the tapping-mode AFM. By combining these elements, 8 nm bits on 20 nm pitch are written at a rate of 5 kbit/s at room temperature in air.