Surface-micromachined millimeter-wave antennas

Yong-Kyu Yoon, Bo Pan, J. Papapolymerou, M. Tentzeris, M.G. Allen
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  
This paper reports various three-dimensional (3-D) surface micromachining technologies and their successful application to a variety of millimeter-wave antennas. Contrary to conventional planar type printed-circuit antenna structures, the 3-D surface micromachined structures described here minimize substrate effects, enabling substrate independence, high electrical performance, and broad bandwidth. The key technologies exploited include epoxy-core conductor technology, magnetic assembly, and
more » ... ctroplating bonding technology. Four millimeter-wave vehicles illustrate the technology: a monopole-driven Yagi-Uda (M-Yagi) antenna; an air-lifted patch antenna; an airlifted coupler; and an air-lifted monopole antenna.
doi:10.1109/sensor.2005.1497490 fatcat:boijrawiane75ohxh5uiwnyl7q