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Realization of nanoscale resolution with a micromachined thermally actuated testing stage
2004
Review of Scientific Instruments
The design, fabrication, and characterization of a microelectromechanical systems ͑MEMS͒ stressstrain device for testing the mechanical properties of nanomaterials is presented. Thermal actuation, with integrated motion amplification structures, was used to both minimize the operating temperature of the device as well as realize fine motion control over large displacements. The device has a working range from tens of nanometers up to 10 micrometers. Displacements as small as 30 nm per 10 mA
doi:10.1063/1.1710703
fatcat:6kxquvfra5ejxgha27aiy2qd3e