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An improvement in Silicon ablation by lasers is achieved when laser ablation takes place under a thin liquid film. Therefore it is necessary to investigate the effects of the liquid on the silicon surface during laser irradiation. Different types of microstructures observed on the silicon -surface of a Si-wafer after nanosecond-pulsed laser irradiation under liquid films of molecular solvents are presented to complete our understanding of the Laser Chemical Processing (LCP). Water anddoi:10.4229/27theupvsec2012-2cv.6.61 fatcat:7zavipro65ejrdttvlcakghate