Impact of the Solvent Properties on the Morphology of the Silicon Surface Generated by Laser Ablation under a Solvent Film

M.I. Sierra-Trillo, M. Glatthaar, S. Hopman, I. Krossing
2012
An improvement in Silicon ablation by lasers is achieved when laser ablation takes place under a thin liquid film. Therefore it is necessary to investigate the effects of the liquid on the silicon surface during laser irradiation. Different types of microstructures observed on the silicon [100]-surface of a Si-wafer after nanosecond-pulsed laser irradiation under liquid films of molecular solvents are presented to complete our understanding of the Laser Chemical Processing (LCP). Water and
more » ... CP). Water and perfluorocarbons (PFCs) are hitherto employed as liquid media due to their high thermal and chemical stability in the LCP. Here we report on results obtained with a new reactor that allows studying the stability of solvents occurring during the laser irradiation and the effects of solvents on the silicon surface during and after laser irradiation.
doi:10.4229/27theupvsec2012-2cv.6.61 fatcat:7zavipro65ejrdttvlcakghate