A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is application/pdf.
Ken YUKIMURA, hisato OGISO, Shizuka NAKANO. "1 Inch-sized HiPIMS Glow Plasma Source for "Minimal Fab Manufacturing System"." Journal of the Society of Mechanical Engineers 117.1148 (2014) 467-469