超音波顕微鏡による固体表面の特性化
Characterization of Solid Surface by Means of Acoustic Microscopy

Kazushi YAMANAKA
1983 Hyomen Kagaku  
New techniques are described for characterizing solid surfaces by means of acoustic microscopy . Acoustic microscopy can visualize subsurface layers of a solid unobservable with optical or electron beam techniques. This advantage makes possible the evaluation of ceramic fracture toughness , a property that determines wear and erosion resistance. Also possible is the study of the delamination mechanism of PVD films under repeated sliding contacts.
doi:10.1380/jsssj.4.149 fatcat:whrbymbefjhs5esvqzg2mqhggm