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The fabrication of microchannels and self-assembled nanostructures in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. While the dimensions in two directions are on a micro-respectively nanoscale, feature lengths of up to 1 mm are achieved. This comes out to aspect ratios of more than 1000. Thisdoi:10.1364/oe.16.001517 pmid:18542227 fatcat:zc5ng7ki7bdb3oalyx72mwxa4y