Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching

Dirk Wortmann, Jens Gottmann, Nelli Brandt, Herbert Horn-Solle
2008 Optics Express  
The fabrication of microchannels and self-assembled nanostructures in the volume of sapphire was performed by femtosecond laser irradiation followed by chemical etching with aqueous solution of HF acid. Depending on the focusing conditions self-organized nanostructures or elliptical microchannels are produced. While the dimensions in two directions are on a micro-respectively nanoscale, feature lengths of up to 1 mm are achieved. This comes out to aspect ratios of more than 1000. This
more » ... 000. This fabrication technique is potentially usable for photonic crystal based integrated optical elements or microfluidic devices for applications in life science, biology or chemistry.
doi:10.1364/oe.16.001517 pmid:18542227 fatcat:zc5ng7ki7bdb3oalyx72mwxa4y