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18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.
We report a phenomenon in which a micromachined heat source placed less than 50 µm above the surface of a liquid drives a high-speed doublet flow pattern with linear velocities reaching nearly 5 mm/sec and rotational velocities up to 1200 rpm. Tests were performed on a 50-100 µmthick layer of water containing 3 µm polystyrene beads for flow visualization. The thermal source is a polyimide cantilever with an integrated heater near the tip, operated with input powers ranging from 0-32 mW. It hasdoi:10.1109/memsys.2005.1454017 fatcat:lto6yvvqvzeihcxxmzhk4rgn5m