CVD OF SiC IN LARGE COATING VESSELS

K. BRENNFLECK, H. REICH
1991 Journal de Physique IV : Proceedings  
In large coating vessels deposition processes are very sensitive to hydrodynamics and kinetics. As one is operating in practice far away from equilibrium thermodynamic predictions are of secondary importance. This partly explains discrepancies with results obtained in laboratory reactors. Therefore optimization of the heat transfer and the gas distribution is a fundamental prerequisite for homogeneous and well-defined depositions. Furthermore temperature increase with simultaneous decrease of
more » ... neous decrease of the total pressure during a deposition cycle improves the uniformity of the coating along the reaction chamber. M.L. Hammnd, Solid State Technology, May 1988, 159-164 M.L. H a m n d , Solid State Technology, June 1988, 103-106
doi:10.1051/jp4:1991257 fatcat:mncchhx4hbb4nnr3ixc45ptxfm