Self-aligned platinum-silicide nanowires for biomolecule sensing

Fu-Hsiang Ko, Zen-Hou Yeh, Chun-Chi Chen, Tzeng-Feng Liu
2005 Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena  
doi:10.1116/1.2090967 fatcat:fmyzg7aqf5ggxa74r6252wglj4