A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is
Self-aligned platinum-silicide nanowires for biomolecule sensing
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
A self-aligned platinum-silicide nanowire for biomolecule sensing is developed in this work. The 40 nm nanowire is fabricated through a sequence of electron-beam writing on the polysilicon film, line shrinkage with alkaline solution, platinum film deposition, 550 °C annealing, and aqua regia dissolution. The immobilization of single-stranded capture DNA onto the platinum-silicide nanowire is verified from the fluorescence-labeled technique. The field-effect transistor can distinguish thedoi:10.1116/1.2090967 fatcat:fmyzg7aqf5ggxa74r6252wglj4