SOI-based, High Reliable Pressure Sensor with Floating Concept for High Temperature Applications

Andrea Giuliani, Lionello Drera, Domenico Arancio, Biswaijit Mukhopadhyay, Ha-Duong Ngo
2014 Procedia Engineering  
doi:10.1016/j.proeng.2014.11.639 fatcat:wg5whbvgzjbwbeavvtan4ohkoi