A novel palladium-based micromembrane has been fabricated which has the potential to be used for water gas shift reaction and hydrogen gas separation in catalytic microreaction systems for methanol fuel reforming. The membrane is supported by a copper film that has an array of patterned holes. Copper will also act as a catalyst in the shift reaction that will convert unwanted carbon monoxide gas produced earlier in the microreaction system during methanol fuel reforming into hydrogen which in

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... rn will be separated by the membrane. The novelty of this structure is that we have integrated the water gas shift reactor as well as the hydrogen gas separator in the same structure. The microfabrication process allows for integration of heaters and temperature sensors into the device.