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International Journal of Reliability, Risk and Safety: Theory and Application
MEMS reliability analysis is a challenging area of research which comprises various physics of failure and diverse failure mechanisms. Reliability issues are critical in both design and fabrication phases of MEMS devices as their commercialization is still delayed by these problems. In this research, a hybrid methodology is developed for the reliability evaluation of MEMS devices. Its first step is the identification of dominant failure modes by FMEA, evaluation of failure mechanisms and andoi:10.30699/ijrrs.1.1 fatcat:d2kvzxrr6basflsuzxsvhyqsbe