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A perforated plate stacked Si/glass heat exchanger with in-situ temperature sensing for joule-thomson coolers
2008
Micro Electro Mechanical Systems (MEMS), Proceedings of the IEEE International Conference on
This paper reports a micromachined recuperative heat exchanger integrated with in-situ temperature sensors. In this design, numerous high-conductivity silicon plates, integrated with platinum resistance temperature detectors (Pt RTDs) are fabricated and stacked alternating with lowconductivity Pyrex spacers. The device is intended for use with Joule-Thomson (J-T) coolers. The fabricated versions of the device have a footprint of 1 1 cm 2 , and lengths of up to 2 cm. Tests at cryogenic
doi:10.1109/memsys.2008.4443788
fatcat:vt72zcnyxvfd7lyd7dht5mklxe