Further Enhancement of Nitride-Based Near-Ultraviolet Vertical-Injection Light-Emitting Diodes by Adopting a Roughened Mesh-Surface

Chia-En Lee, Yea-Chen Lee, Hao-Chung Kuo, Tien-Chang Lu, Shing-Chung Wang
2008 IEEE Photonics Technology Letters  
In this letter, the nitride-based near-ultraviolet (NUV) vertical-injection light-emitting diodes (VLEDs) with roughened mesh-surface are proposed and demonstrated by a combination of pattern sapphire substrate, wafer bonding, laser lift-off, and chemical wet etching processes. With the help of adopting a roughened mesh-surface, the light-output power (at 350 mA) of the NUV-VLEDs could be further enhanced about 20% as compared with that of the conventional NUV-VLED. Index Terms-Laser lift-off
more » ... ms-Laser lift-off (LLO), roughened mesh-surface, vertical-injection light-emitting diodes (VLEDs), wafer bonding.
doi:10.1109/lpt.2008.921129 fatcat:44ewdwbos5dktk4vbgwffsh4aa