A High-Speed White-Light Scanning Interferometer for Bump Inspection of Semiconductor Manufacture
반도체 Bump 검사를 위한 백색광 주사 간섭계의 고속화

Kuk Won Ko, Jae Hwan Sim, Min Young Kim
2013 Journal of the Korean Society for Precision Engineering  
The white-light scanning interferometer (WSI) is an effective optical measurement system for high-precision industries (e.g., flat-panel display and electronics packaging manufacturers) and semiconductor manufacturing industries. Its major disadvantages include a slow image-capturing speed for interferogram acquisition and a high computational cost for peak-detection on the acquired interferogram. Here, a WSI system is proposed for the semiconductor inspection process. The new imaging
more » ... w imaging acquisition technique uses an 'on-the-fly' imaging system. During the vertical scanning motion of the WSI, interference fringe images are sequentially acquired at a series of pre-defined lens positions, without conventional stepwise motions. To reduce the calculation time, a parallel computing method is used to link multiple personal computers (PCs). Experiments were performed to evaluate the proposed high-speed WSI system.
doi:10.7736/kspe.2013.30.7.702 fatcat:2tm3kep45bcvbhitrzh6blqnlu