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This study provides a complete Selective Compliance Assembly Robot Arm (SCARA) wafer inspection system. This system mainly includes two phases. In the first phase, a SCARA manipulator acts as an inspection application platform, and a depth camera is used to position the position vector of an inspection point and a cassette together with a single-axis visual frame so that SCARA can automatically perform calibration in the working area. In the second phase, the wafer ready for inspection isdoi:10.1109/access.2022.3172953 fatcat:xtqu7zqp4jdk5lh7uolnw3b4da