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The Ni electrodeposition into the trench pattern
Electroforming technologies of Ni have been widely used in nanoimprint technologies and micro reactor system. In this study, superconformal filling of trenches with electrodeposited Ni were made by using Damascene process. We focused on the effect of chloride ions on the growth of Ni film anddoi:10.11486/mes.18.0_2a3-1 fatcat:splcvif3ezcqjlbozgxhwozohq