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2007 Ph.D Research in Microelectronics and Electronics Conference
A closed-loop control approach for the dynamic shaping of a microbeam by electrostatic actuation is described. Starting from a desired displacements reference vector of N small segments of the beam (representing the approximation of the continuous case), n controllers (n is the number of considered modes) output the stresses that must be distributed throughout the beam, on the N actuators. Because this reference may vary with time, the controllers are designed so that they accomplish gooddoi:10.1109/rme.2007.4401846 fatcat:2jabxq7dajd35ldcuqsd5ns7fq