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Electropolishing of GaAs
Ga Asの電解研摩
1970
Journal of the Japan Society of Precision Engineering
Ga Asの電解研摩
Preserved Fulltext
In order to find out the mirror-finish conditions for GaAs substrates with non-damage, which are used for diodes in ultra high frequencies with very high speeds, a disc type electro-polishing machine is made trially, and the suitable electrolytes, polishing conditions and stock removals
doi:10.2493/jjspe1933.36.457
fatcat:xqen2xuj65gnflkpjpkws6p3ku