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Microfabrication and characterization of teflon af-coated liquid core waveguide channels in silicon
IEEE Sensors Journal
The fabrication and testing of Teflon AF-coated channels on silicon and bonding of the same to a similarly coated glass wafer are described. With water or aqueous solutions in such channels, the channels exhibit much better light conduction ability than similar uncoated channels. Although the loss is greater than extruded Teflon AF tubes, light throughput is far superior to channels described in the literature consisting of  planes in silicon with 45 sidewalls. Absorbance noise levelsdoi:10.1109/jsen.2003.820343 fatcat:wpy33tdm7beethcmtjifxhccdi