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Photoinductive (PI) field mapping for eddy-current (EC) probes above a thin metal film was performed by multiphysics analysis with two-dimensional finite element method (FEM). The FEM model of PI method was used to observe how metal film properties affect the field-mapping signals of EC probes. The PI signal was tested for effects of resistivity, temperature coefficient of the resistivity, thermal conductivity, heat capacity, and thin film density The applicability of actual thin film materialsdoi:10.2528/pierb11050302 fatcat:xu5wwmmmhrgwbc3ducr5xmhkni