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Infrared rotating-analyzer ellipsometry: calibration and data processing
1993
The necessary relationships and a calibration procedure is presented for a rotating analyzer infrared ellipsometer that uses wire grid polarizing optics. The wire grid polarizers contribute significant ellipticity due to relatively low extinction ratios. Jones matrices are used for the quarter-wave-plate, polarizer, sample, rotating analyzer ellipsometer configuration. Results from a calibrated infrared and visible light ellipsometer for silicon dioxide films on silicon are compared.
doi:10.17615/43mr-9v98
fatcat:quy7u3ewarflvp7hsmb4ejxw6u