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Measurement results of the output stepping rotary angle of a piezoelectric-driven rotary actuator by means of inchworm motion have been compared with results obtained from three-dimensional Finite Element Analysis (FEA). Comparison results showed a good quantitative agreement, and confirmed the validity and accuracy of the finite element method in the design and analysis of the inchworm-type rotary actuators. In addition, the effect of the gap between the stator and rotor on the workingdoi:10.4028/www.scientific.net/amm.551.115 fatcat:c53kvsypafhnrpsmbtevx6lnki