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MAGNETIC ANISOTROPY IN MAGNETRON IN-LINE SPUTTERED COBALT-ALLOY THIN FIKM DISKS
1993
ITE Technical Report
Preserved Fulltext
reT.ial-v=d -"u'oalloy grains Iocally elongated -in the direction of pallet movement. It was shewn from the present study that approximately 45 % of Co-alloy grains on Cr-underlayer have in-plane c-axis and the resultant c-axis vector component of grains orients to the texture groove direction.
doi:10.11485/tvtr.17.68_61
fatcat:l755kawlzrevhg5g7h5x3z5gsu