MAGNETIC ANISOTROPY IN MAGNETRON IN-LINE SPUTTERED COBALT-ALLOY THIN FIKM DISKS

Myong R. KIM
1993 ITE Technical Report  
reT.ial-v=d -"u'oalloy grains Iocally elongated -in the direction of pallet movement. It was shewn from the present study that approximately 45 % of Co-alloy grains on Cr-underlayer have in-plane c-axis and the resultant c-axis vector component of grains orients to the texture groove direction.
doi:10.11485/tvtr.17.68_61 fatcat:l755kawlzrevhg5g7h5x3z5gsu