GaAs-Based Waveguide MOEMS

O.B. Spahn, T. Bakke, C.P. Tigges, J. Johnson, G. Grossetete, F.R. Gass, E.M. Ochoa, J.L. Reno, J.F. Klem, G.M. Peake, C.T. Sulllivan
2002 2002 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
We describe our work on GaAs-based waveguide switch that is also a mechanical cantilever. Several types of 1xn switches have been fabricated and performance of a 1x2 device is presented. Switching voltages between 6V and 13V volts and switching speeds as low as 32 µsec have been measured.
doi:10.31438/trf.hh2002.27 fatcat:vtckc5fs25av7ftvorofvawzvq